Microfabrication is essentially the process which involves fabrication of microscale and smaller structures for the development of practically applicable electronic devices. The most basic microfabrication methods imply the development of semiconductor based integrated circuits. The increased importance in the recent past can be understood from the fact that miniaturization is the most essential step towards the successful production of portable electronic devices which may someday find applications in the telecommunication industry, healthcare industry or other related or unrelated branches. The most important and hence researched topics of microfabrication include doping, etching, bonding, thin films and microlithography.