Structural Chemistry & Crystallography Communication

THE FABRICATION OF ITO NANOWIRES BY RF-SPUTTERING

3^rd Edition of International Conference on Advanced Spectroscopy, Crystallography and Applications in Modern Chemistry
June 04-05, 2018 London, UK

Qiang Li

Xi��?an Jiaotong University, China

Posters & Accepted Abstracts: Struct Chem Crystallogr Commun

DOI: 10.21767/2470-9905-C1-006

Abstract

Tin-doped indium oxide (ITO) is considered as one of the most important transparent conducting oxide (TCO) materials used in the fabrication of optoelectronic devices such as light-emitting diodes (LED), solar cells, flat panel displays, sensors, etc. Diverse routes to produce highly conductive and transparent ITO thin films have been developed to date. ITO film is still dominant in the market because of its mature technology, though other materials have been researched to replace it on some flexible devices. Recently, the nanoscal structures (e.g., nanorods, nanowires, nanotetrapods, and nanobelts) of semiconducting metal oxides have attracted much attention due to the high surface-volume ratio, excellent photoelectric properties and various potential applications. In our previous study, high conductivity and transparency of the ITO nanowires improved light extraction efficiency in blue and green LEDs, and bipolar resistive switching behavior of the ITO nanowire networks was observed. There are many different methods to growth ITO nanowires, such as chemical vapor deposition, chemical synthesis, obliqueincidence electron-beam (e-beam) deposition, sputtering, and thermal treatment. But the most stable and economical techniques are e-beam deposition and sputtering. Sputtering deposition is one of the most favorable and facile techniques in terms of the scaleup and mass production. However, synthesis of high quality ITO nanowires by sputtering has not been demonstrated. The direct current (DC) sputtering resulted in relatively low density of ITO whiskers and the growth rate was slow, so the radio-frequency (RF) sputtering is needed to study for wide application. liqiang2014@mail.xjtu.edu.cn