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E u r o S c i C o n C o n f e r e n c e o n
Nanotechnology &
Smart Materials
Nano Research & Applications
ISSN 2471-9838
O c t o b e r 0 4 - 0 6 , 2 0 1 8
Am s t e r d a m , N e t h e r l a n d s
Nanotechnology & Smart Materials 2018
Page 28
A
n overview is presented for our recent study of novel graphene nano-electro-
mechanical (GNEM) devices. We first present GNEM devices for low-power
switching and ultra-sensitive chemical gas sensing applications. Three-terminal
GNEM switches with heterogeneously stacked graphene/h-BN layers are
developed, which achieves low-voltage and sub-thermal switching (S<<60 mV/
decade). We then present GNEM chemical gas sensors, which detect either
resistance or mass changes due to a small number of gas molecules physisorbed
onto suspended graphene at room temperature. With the resistance detection
method,weshowquantizedincrementsinthetemporalresistance,signifyingsingle
CO
2
molecule adsorption. As for the mass detection method, we demonstrate the
resonance frequency shift of a doubly-clamped graphene resonator with the mass
resolution of hundreds zeotpgram (10-
21
g) order. We also show our recent attempt
of patterning single-nanometer-size nanopores in suspended graphene by using
state-of-the-art atomic-size focused helium ion beam. Arrays of pores of 3-4 nm
in diameter spanning a complete suspended ribbon were successfully patterned
with a pitch down to ~14 nm. Thanks to a very high Young’s modulus and therefore
a high Debye temperature of graphene, the phononic bandgaps are expected to be
formed in the bandwidth of a fewTHzwith such single-nanometer pore arrays. This
enables us to control thermal transport dominated by heat phonons for relatively
low temperature (<200°C). We will discuss the possibility of GNEM-based heat
phonon engineering applications
Biography
Hiroshi Mizuta (C Phys FInst P) is currently Distinguished Pro-
fessor at School of Materials Science, Japan Advanced Institute
of Science and Technology (JAIST). He holds a joint appoint-
ment, as Visiting Chief Scientist with the Hitachi Cambridge
Laboratory. He has a strong research interest in silicon- and
graphene-based nanoelectronic devices and nano-electro-me-
chanical-systems (NEMS) and has led a number of large re-
search projects in the UK and Japan, including PI of the UKRC
EPSRC project SISSQIT (2010-2013) on electron spins in Si
quantum dots, the EPSRC-JST UK-Japan project NOVTLOS
(2011-2014) inwhich his teamdeveloped a newSi-basedNEMS
nonvolatile switch, and PI of the Japan MEXT grant-in-aid for
scientific research projects, Development of Graphene NEMS
Hybrid Functional Devices for Autonomous and Ultrasensitive
Integrated Sensors (2013-2018) and Single-Nanometer-Scale
Graphene Nems Technology for Heat Phonon Engineering
(2019- 2023). He has published more than 530 peer-reviewed
scientific papers and filed over 50 patents.
mizuta@jaist.ac.jpGraphene NEMS technology for extreme sensing
and nano thermal engineering
H Mizuta
1, 3
, M E Schmidt
1
, M. Haque
1
,
S Kubo
1
, G Agbonlahor
1
, H Miyashita
1
,
J Kulothungan
1
, S Ogawa
2
and M Muruganathan
1
1
Japan Advanced Institute of Science and Technology (JAIST), Japan
2
National Institute of Advanced Industrial Science and Technology (AIST), Japan
3
Hitachi Cambridge Laboratory, Hitachi Europe Ltd, UK
H Mizuta et al., Nano Res Appl Volume:4
DOI: 10.21767/2471-9838-C6-024